This book presents select proceedings of the ISSS International Conference on Micro, Nano, and Smart Systems (IC-MNSS) in IISc Bengaluru during July 9 to 12, 2024 and presents different applications of smart materials and systems in aerospace, robotics, quantum, agriculture, and biomedical technologies followed by microfabrication processes and packaging technologies required to design and develop different sensors on micro and nanoscale. The first few chapters cover shape memory alloys (SMA) and its modelling and remaining chapters outline the application of smart systems and materials in quantum technology, digital agriculture, and healthcare. After describing the microfabrication processes in bulk and surface micromachining processes, the design and development of various sensors are demonstrated in the last few chapters. The book is valuable to researchers and professionals working in the area of micro and nano-based design, fabrication, and development of sensors, and their application in smart systems, water purification, and energy harvesting.